| 摘要 |
PURPOSE:To restrain temperature rise of an X-ray detector even when bake-out is conducted in a state where cooling by liquid nitrogen is not applied, and further to prevent pollution due to gas. CONSTITUTION:This energy distribution type X-ray analyzing device is cooled by an outside cooling tank 1, and detects and analyzes a characteristic X-ray emitted from a sample in a vacuum vessel 6. This device is provided with the cooling tank 1 for containing refrigerant; an X-ray detector 4 arranged in the vicinity of a sample; a heat conductive rod 3 for connecting a bottom part of the cooling tank 1 to the X-ray detector 4; a protection vessel 5 having a tubular part underneath and vacuum-enclosing the cooling tank 1, a heat conductive rod 3 and the X-ray detector 4; and evacuation means 16-18 for vacuum evacuating a space between the protection vessel 5 and the cooling tank 1 at the time of conducting bake-out inside the vacuum vessel 6. With this constitution, even when refrigerant in the cooling tank 1 is exhausted and the X-ray detector 4 is at a room temperature, gas once released at the time of bake-out can be discharged to obtain vacuum so as to prevent pollution of the X-ray detector 4 due to the released gas as well as temperature rise due to the bake-out. |
