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发明名称
SPUTTERING APPARATUS
摘要
申请公布号
JPH05259126(A)
申请公布日期
1993.10.08
申请号
JP19920089577
申请日期
1992.03.13
申请人
发明人
分类号
C23F4/00;C23C14/02;H01L21/302;H01L21/3065;H01L21/31;(IPC1-7):H01L21/302
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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