| 摘要 |
<p>PURPOSE:To make it possible to attract a specimen exactly without producing any adverse effects on a secondary electronic detector by arranging a structure so that the attracting surface is completely covered even by the smallest substance to be attracted among those having different sizes. CONSTITUTION:An apparatus has the semi-circular flat electrodes 23a and 23b which are formed to face each other on an insulated chucking board 21. An insulating layer 22 is formed in an area including the circumference of the electrodes 23a and 23b and an electrostatic chuck 21. Also, the upper surface of the insulating layer 23 constitutes an attracting plane the shape and size of which are arranged so as to be covered even by the smallest substance among those to be attracted. When attracting a substance 6 which is larger than the attracting plane, the voltages of power-supplies 25a and 25b are applied to the electrodes 23a and 23b. When attracting the substance of the smallest size, the insulating layer is not exposed. There is no possibility that the insulating layer is charged; thus eliminating any instability in the truck of the charged corpuscular beam and others.</p> |
