| 摘要 |
PURPOSE:To obtain the tapered optical waveguide which can be easily produced and is small in waveguide loss and the process for production of the waveguide. CONSTITUTION:The upper clad layer 104 of the InP of the optical waveguide constituted by successively laminating a lower clad layer 102 of InP, a core layer 103 of InGaAsP and the upper clad layer 104 of the InP on an InP semiconductor substrate 101 is partly formed with a tapered ridge part 106 of the width and height gradually increasing in the waveguide direction. Light is guided in the upper clad layer 104 of the InP having the tapered ridge part 106 changing in the thickness to a tapered shape, by which the guided light distribution of the guided light gradually increasing or decreasing in the direction perpendicular to the substrate is formed and the high-efficiency optical coupling is enabled. |
