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发明名称
摘要
申请公布号
JPH0572117(B2)
申请公布日期
1993.10.08
申请号
JP19890032195
申请日期
1989.02.10
申请人
ROHM KK
发明人
ISHIDA JUJI;NAKAGAWA YASUFUMI;TANAKA HARUO
分类号
H01L21/203;H01S5/00;(IPC1-7):H01S3/18
主分类号
H01L21/203
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代理人
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