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申请公布号
JPH05259874(A)
申请公布日期
1993.10.08
申请号
JP19920185290
申请日期
1992.07.13
申请人
发明人
分类号
H01L21/8238;H01L27/088;H01L27/092;H03K17/041;H03K17/16;H03K19/003;H03K19/0175;H03K19/094;H03K19/0952;(IPC1-7):H03K19/017;H03K19/095
主分类号
H01L21/8238
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