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发明名称
ANALYZING DEVICE FOR MICROWAVE PLASMA MICRO-QUANTITY ELEMENT
摘要
申请公布号
JPH05258711(A)
申请公布日期
1993.10.08
申请号
JP19920057780
申请日期
1992.03.16
申请人
发明人
分类号
G01N27/62;H01J49/04;H01J49/26;(IPC1-7):H01J49/04
主分类号
G01N27/62
代理机构
代理人
主权项
地址
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