Spring-type holding frame for disc-shaped workpieces - which minimises covered areas on workpiece surface

摘要

Holding device for flat workpiece with at least partially strip-like edges comprises linear spring pins which are fitted into and movingly supported in openings in a frame. The workpiece can be supported inside the stressed pins. USE/ADVANTAGE - For surface treating esp. discs such as CD's, hard discs, magneto-optical discs, semiconductor wafers etc. during PVD or CVD or plasma enhanced CVD methods or etching a thermal treatment. Thin discs of max. 0.5mm thickness and 2-10 cm diameter can be held with min. amount of surface covered or shaded. Thermal expansion of the disc can be compensated for without the disc becoming distored or fractured. Scratching danger is minimised during loading and unloading.