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发明名称
摘要
申请公布号	JPH0539628(Y2)	申请公布日期	1993.10.07
申请号	JP19870056981U	申请日期	1987.04.14
申请人		发明人
分类号	H01L21/31;H01L21/205;(IPC1-7):H01L21/205	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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