| 摘要 |
Described is a device and method for handling objects which, for their fabrication, require clean-room conditions. Located in an area of the clean room are a processing zone (6) and a cleaning zone (8), the transport containers (12) being cleaned, inside the processing zone (6), by a stream of ions. This concept and method make it possible to cut costs by using clean-room islands in production zones of any kind and thus represent an inexpensive alternative to prior art methods for existing installations.
|
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORP., ARMONK, N.Y., US |
发明人 |
SWOBODA, BRUNO, 6500 MAINZ, DE;SCHWARZE, JUERGEN, 6501 SAULHEIM, DE;WILD, INGO, 6500 MAINZ, DE |
