Substrate coating appts with metal oxide superconductor - comprises coating chamber contg. heater, and laser ablation appts. to provide stream of superconducting material

摘要

Appts. for coating at least one flat surface of a substrate with a metal oxide superconducting material of high transition temp. comprises: (a) a coating chamber contg. a heater to heat the substrate; and (b) a laser ablation appts. to produce a partial stream of corresponding superconducting material or a preproduct of this material. The substrate (3) in the chamber (4) is arranged such that the normal (N) is directed vertically onto the flat side (3a, 3b) of the substrate, based on the direction of the partial stream (5). The heater (10) is powered by irradiation heat. ADVANTAGE - Avoids damaging the smooth surfaces of high temp. superconducting layers.