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发明名称
Verfahren und Vorrichtung zum Herstellen eines epitaxial aufgewachsenen Vielschicht-Kristalls
摘要
申请公布号
DE4292933(T1)
申请公布日期
1993.10.07
申请号
DE19924292933T
申请日期
1992.09.10
申请人
NISSHIN STEEL CO., LTD., TOKIO/TOKYO, JP
发明人
KURATA, KAZUHIRO, TOKIO/TOKYO, JP;NAKAMURA, HAJIME, TOKIO/TOKYO, JP;TOMIDA, HIROSHI, TOKIO/TOKYO, JP
分类号
C30B19/00;C30B19/06;H01L21/208;(IPC1-7):C30B19/02
主分类号
C30B19/00
代理机构
代理人
主权项
地址
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