APPARATUS FOR WASHING SEMICONDUCTOR MATERIALS,申请号GB19900024307-传众专利搜索

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发明名称	APPARATUS FOR WASHING SEMICONDUCTOR MATERIALS
摘要
申请公布号	GB2238610(B)	申请公布日期	1993.10.06
申请号	GB19900024307	申请日期	1990.11.08
申请人	* SEIICHIRO AIGO	发明人	SEIICHIRO AIGO
分类号	B08B15/04;H01L21/00;H01L21/304	主分类号	B08B15/04
代理机构		代理人
主权项
地址

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