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发明名称
PROCESS FOR PREPARING THIN FILM OF BASE METAL AND APPLICATION OF THE SAME
摘要
申请公布号
EP0316452(B1)
申请公布日期
1993.10.06
申请号
EP19880904615
申请日期
1988.05.20
申请人
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
TABATA, MUNEHIRO;HAYASHI, CHIHARU;ISOZAKI, YASUHITO;OKANO, KAZUYUKI;HASEGAWA, YO
分类号
C23C18/08;H05K3/10
主分类号
C23C18/08
代理机构
代理人
主权项
地址
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