Improvements in and relating to charged particle beam scanning apparatus.

摘要

Scanning beam apparatus adapted to display two views of a surface for stereoscopic viewing, wherein two series of electrical signals are obtained by scanning the surface with a normal and then tilted beam wherein alternate tilting of the beam is achieved by adjusting during alternate scans the currents flowing in the gun alignment coils (12) of the SEM so as to shift the beam, and simultaneously introducing an offset in the signals applied to at least one other element (14 or 16) in the beam forming and focussing assembly, to counteract the shift introduced by the alignment adjustment. The offset ensures that the point of intersection of the beam axes follows the focal plane as focus is altered. The two video signals may be correlated to produce a correlation signal whose value for each point in the surface indicates the apparent shift in position of that point as between the normal and tilted beam scans, to produce a signal indicative of the surface topography. The correlating signal may be converted to a focussing control signal and may be enhanced by a process of successsive approximations. Where the signals are to be displayed the two series of electrical signals may be supplied to a frame store (36) which includes a feedback loop and input feedback multiplying means (38, 40) forming a recursive filter, and a signal converter means (42) including an R B G look-up table memory means for generating R, G and B signals for display by a colour monitor (44).