PLASMA PROCESSING METHOD,申请号JP19920105195-传众专利搜索

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发明名称	PLASMA PROCESSING METHOD
摘要
申请公布号	JPH05255871(A)	申请公布日期	1993.10.05
申请号	JP19920105195	申请日期	1992.03.12
申请人		发明人
分类号	B23H7/36;C23F4/00;H01L21/302;H01L21/3065;(IPC1-7):C23F4/00	主分类号	B23H7/36
代理机构		代理人
主权项
地址

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