| 摘要 |
PURPOSE:To provide a vibration gyro formed with a piezoelectric body layer with an orientable crystal irrespective of the type and state of a vibrator. CONSTITUTION:An almost triangular columnar vibrator 12, two X-shaped support members 14a, 14b and a rectangular frame-form support block 16 are solidly formed by etching a silicon substrate. A lower electrode 20 consisting of a metal film is formed in the whole surface of each of three sides of the vibrator 12. In addition, a piezoelectric body layer 22a consisting of a piezoelectric film and an upper electrode consisting of a metal film are positively formed in the center of one side of the vibrator 12. Likewise, even in the center of other sides of the vibrator 12, the piezoelectric body layer and the upper electrode are positively formed each. As for material of these piezoelectric body layers, barium lead niobate is used. |
