发明名称 METHOD AND APPARATUS FOR PRODUCING HIGH DENSITY PLASMA USING WHISTLER MODE EXCITATION
摘要 <p>High density plasma is produced in a long cylindrical cavity (42) by the excitation of a high frequency whistler wave within the cavity. The cylindrical cavity, and hence the plasma, is embedded in a high magnetic field (Bo), with magnetic lines of force passing axially (longitudinally) through the cavity. The magnetic field has an electron cyclotron frequency (φce) associated therewith that is much greater than the wave frequency (φ) associated with the whistler wave. In one embodiment, electromagnetic energy is coupled axially into the cylindrical cavity (40) using a resonant cavity (30'), which coupled energy excites the whistler wave. In another embodiment, a plasma formation tube (102) is positioned coaxially within a cylindrical cavity (104), which cylindrical cavity includes a resonant cavity (142) at one end thereof. The plasma is created without using electrodes; and the excitation of the whistler wave is achieved at a high Q value.</p>
申请公布号 WO1993019573(A1) 申请公布日期 1993.09.30
申请号 US1993002865 申请日期 1993.03.25
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