| 摘要 |
PURPOSE: To obtain a relief image having improved resolution by using a resin binder, an acid generator compound and a complexing polar compound as components of the composition. CONSTITUTION: This composition is produced by adding a polar compound to a radiation-sensitive composition such as photoresist. This method comprises coating a substrate with a layer of the composition thus produced, exposing the composition layer to actinic radiation to form a latent image contg. an acid moiety complexed with the polar compound and to generate an acid in an amount sufficient for activation from the resulting complex by treating the composition layer. At this time, this polar compound effectively functions as a base and has at least one moiety capable of complexing a photo-generated acid at room temp., namely, a useful polar compound (polar oxide) has at least one moiety capable of forming a complex together with a photo-generated acid and this complex is required to release acid in an amount sufficient for activation and to cause a desired acidcatalytic reaction, at the time of heating the complex to a baking temp. after the exposure to radiation. |
