SYSTEM OF MAKING DIAGNOSIS OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE:To realize a diagnostic system capable of grasping phenomena on which the diagnosis of a semiconductor manufacturing equipment is made by a method wherein equipment sequence data which enable a manufacturing equipment to operate are set for the equipment, the equipment is made to operate following the data concerned, and the operation data and conditions of the equipment are monitored. CONSTITUTION:Items required for monitoring the operation change of an equipment required for diagnosis as the conditions of the equipment in operation are prepared and set (process 1). Data are collected from the equipment following the set monitoring items (process 2). The collected data are classified into the operating condition data sorted out for each of the previously set equipment operating items (process 3). The retrieved data are calculated in accordance with a previously set calculating formula so as to obtain a physical quantity which represents the feature of the operating conditions (process 4). The obtained physical quantity is compared with a previously determined reference value or a physical quantity when an equipment was normal in operation to judge operating conditions (process 5). A judgment result is outputted in accordance with a ruled order (process 6). The output concerned is indicated by paper or on a display.