DISCHARGE EXCITATION TYPE LASER DEVICE

摘要

PURPOSE:To prevent the deterioration of the laser optical part of a discharge excitation type laser device. CONSTITUTION:Gas introducing paths 20 for blowing off a laser gas 1 toward the direction of an excitation space in a chamber 5 are formed to flanges 18 for introducing the gas for introducing the laser gas 1 to the vicinity of a partial reflecting mirror 2 and a total reflecting mirror 3, and the laser gas 1 is not sprayed directly against the partial reflecting mirror 2 and the total reflecting mirror 3.