| 摘要 |
PURPOSE:To remove the errors caused by the difference in the reflectivity and the thickness of a sample and, to omit a reference sample and to perform the expansion and the like of the width of an object line in the measurement of the minute line in an IC and the like. CONSTITUTION:The measured signal of a line width (the distribution of a signal strength) at a part, which has the same shape as that of an object to be measured and has a resolution larger than that of an objective lens, is received. The received signal is differentiated and PSFk(X) is obtained 3. Then the measured line-width signal of the line width to be measured (the distribution of the signal strength) is received. The value of X is shifted by DELTAX in the direction of the differentiation, until X agrees with the waveform of the measured line- width signal, PSFk(X) is computed for k=0-n and the sum is obtained. The product of the number of integrations (n) and the quantity DELTAX, nDELTAX, is the obtained line width W. |
