| 摘要 |
<p>PURPOSE:To efficiently collect the data of multi-channel and large capacity process information, to display the process state in actual operation on monitor screen at high speed and to inform a process controller of the generation of abnormality in the case an abnormality is detected or predicted. CONSTITUTION:The process state is monitored rapidly and in detail by means of a process controller 2 directly controlling a film-forming device 1, data collecting controllers 3a-3d receiving timing information from each process chamber in the film-forming device 1, A/D converting each process information in the film-forming device 1 by types, collecting data in a temporary storage memory 38, and performing abnormal detection of the process information, a server absorbing data in the memory 38 in each data collecting controller 3a-3d to be stored in the hard disk, and display controller 3f for monitor displaying the result collected from this server as needed. Thereby the monitoring of abnormality and the display of the process state are performed.</p> |
