| 摘要 |
<p>PURPOSE:To enable stable shifting by holding a plurality of wafers so that the lower end lines of each wafer are formed at an angle corresponding to the inclination of a trench to the horizontal direction by a wafer chuck and leaning the wafers against the trench when the wafers are shifted to a quartz boat etc., fixed while the trench is inclined toward the vertical direction. CONSTITUTION:A quartz boat 30 to which a plurality of tilted trenches are notched is fastened onto boat support members 6a, 6b in different height so that the trenches are made perpendicular. A wafer chuck 25 is positioned just above No.1 carrier 29a, and wafers are held and lifted so that the lower end lines of each wafer 28 are inclined, and lowered to the pre-stage side of the quartz boat. Each wafer 28 held to the chuck 25 is engaged with the trenches in the slanted quartz boat 30 and shifted. The quartz boat 30 is fixed, and only the wafer chuck 25 is moved vertically, thus avoiding the effect of vibrations, etc., to the wafers 25 previously leaned against the boat 30 in shifting operation after No.2.</p> |
