发明名称 MARCHING INTERCONNECTING LINES IN SEMICONDUCTOR INTEGRATED CIRCUITS
摘要 In order to reduce parasitic capacitive cross-coupling in an integrated circuit, metallization lines in an array--for example, an array of word lines, of bit lines, or of bus interconnects--are topologically arranged in a systematically progressive marching sequence, whereby the identity of the lines located on one side (or on both sides) of a given line keeps changing.
申请公布号 HK96093(A) 申请公布日期 1993.09.24
申请号 HK19930000960 申请日期 1993.09.16
申请人 AMERICAN TELEPHONE AND TELEGRAPH COMPANY 发明人 LEBOWITZ, JOSEPH;LYNCH, WILLIAM THOMAS
分类号 H01L21/82;H01L21/3205;H01L21/8242;H01L23/52;H01L23/522;H01L23/528;H01L27/10;H01L27/108;(IPC1-7):H01L23/52 主分类号 H01L21/82
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