| 摘要 |
PURPOSE:To obtain a porous aluminum nitride sintered body excellent in thermal shock resistance and machinability and high in heat conductivity by mixing AlN powder, carbon, rear earth and/or alkali earth compound, molding, and executing the 1st stage sintering at a temp. below liquid phase forming temp. and the 2nd stage sintering at a temp. above the liquid phase forming temp. CONSTITUTION:Aluminum nitride powder having 5wt.% oxygen and 0.1-5mum average particle diameter, carbon (e.g., carbon powder), 0.5-1.5wt.% rear earth and/or alkali earth element compound as a sintering assistant agent are blended. A vessel for sintering is preferably one capable of creating carbon gas atmosphere during sintering. The porous aluminum nitride sintered body having <=95% relative density and >=5W/m.k heat conductivity is obtained by sintering at 1200-2100 deg.C in 1-10C/min temp. rising rate at the time of the 1st stage sintering process and at 1900-2150 deg.C for >=0.2 hours at the time of the 2nd stage sintering process. |
