| 摘要 |
PURPOSE:To lower the cost of the glass waveguide by applying an aq. soln. of a rare-earth element-contg. alkali metal silicate on a substrate, then curing the soln. to form a glass film, patterning the glass film by a specified method and coating the core with a clad. CONSTITUTION:An aq. soln. 3 of an alkali metal silicate having a higher refractive index, contg. a rear-earth element such as Er and shown by Me2O nSiO2 xH2O (Me is alkali metals) is added onto a substrate 1 of quartz, etc., from a cup 2 to form a film. The film is then heated in a microwave oven 4 and dried to form a film 3a of a rare-earth element-contg. alkali metal silicate, and then the substrate is further heated to 1200-1300 deg.C in a heating furnace 5 to obtain the substrate 1 coated with a transparent glass film. A WSi film and then a photoresist film are formed on the film 3a, and photolithography is applied through a mask to pattern the film. The patterned film is masked and then dry-etched to remove the film to form a core. The core is coated with a clad to obtain an embedded glass waveguide. |
