| 摘要 |
PURPOSE:To permit the formation of an optical fiber fixing groove with good accuracy even on a stepped substrate by forming the groove for fixing the optical fiber to the position where the central axis of an optical waveguide and the central axis of the optical fiber align to each other. CONSTITUTION:The worked substrate 1 is immersed into a vessel 9 contg. a KOH etching soln. 8 and a laser beam 11 emitted from an Ar laser 10 is projected through a reflecting mirror 12 and a condenser lens 13 at a spot of smallest 3mum to the substrate 1. The spot diameter can be adjusted and the beam can be set to a desired start position by using an observation optical system 14 and changing the focal position. The vessel 9 is fixed onto a precision moving table 15. The optical waveguide having a desired shape and pattern and the V groove 7 for fixing the optical fiber are formed by controlling the extent of the movement of the table 15 and the output of the Ar laser 10. |
