A pyrolitic boron-nitride composition which comprises boron nitride and a trace amount of zirconium, the composition having a bimodal X-ray rocking curve for the 002 plane with a peak X-ray intensity between -35 DEG and -37 DEG and a peak X-ray intensity between +35 DEG and +37 DEG from the angle corresponding to deposition plane, each of the two peak intensities having a FWHM less than 30 DEG , wherein the rocking curve has an X-ray intensity at the zero degree angle corresponding to the deposition plane of less than about 20 percent of either of the two peak intensities; and its production.
申请公布号
DE69002778(D1)
申请公布日期
1993.09.23
申请号
DE1990602778
申请日期
1990.03.01
申请人
PRAXAIR S.T. TECHNOLOGY, INC., NORTH HAVEN, CONN., US
发明人
MOORE, ARTHUR WILLIAM, NORTH OLMSTEAD, OH 44070, US