| 摘要 |
A pulsed gas-discharge laser, in particular an excimer laser, comprises main discharge electrodes (10, 10a) of erosion-resistant metal between which laser gas flows with high velocity to replace the laser gas between the main discharge electrodes from laser pulse to laser pulse. For preionizing the laser gas two X-ray radiation sources (30, 30a) are arranged adjacent one main discharge electrode (10). The flow path (18) of the laser gas is formed partially by flow bodies (16, 16a, 32, 32a) which consist of a material which has a high secondary emissive power with regard to the X-ray radiation. The secondary radiation is so configured that it promotes the preionization.
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