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发明名称
SCANNING ELECTRON MICROSCOPE WITH ELECTRON GUN OF ELECTRIC FIELD EMISSION TYPE
摘要
申请公布号
JPH05242844(A)
申请公布日期
1993.09.21
申请号
JP19910179141
申请日期
1991.07.19
申请人
JEOL LTD
发明人
OOI MASAMICHI
分类号
H01J37/04;H01J37/073;H01J37/22;(IPC1-7):H01J37/073
主分类号
H01J37/04
代理机构
代理人
主权项
地址
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