| 摘要 |
PURPOSE:To enable the gap of a pair of stand-by ionization electrodes in a pulse gas laser to be adjusted simply in a short time. CONSTITUTION:One stand-by ionization electrode 15 which adjusts the gap position of stand by ionization electrodes 15, 16 is constituted of a bolt-shaped pin electrode 17 having a screw zone in the surface and a screw 18 so arranged as to surround the screw zone of this pin electrode 17. This screw 18 is sandwiched between the head of the pin electrode 17 and a fixed plate 19 and fixes the pin electrode 17 to the fixed plate 19 via a nut 20 from the rear of the fixed plate 19 with the spring 18 kept compressed. |
