发明名称 HIGH SPEED SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要 PURPOSE:To improve rapid operativity by realizing a narrow region for injecting one dimensional carrier beyond limitations by lithography technique and by accordingly enabling traveling of carrier which gets near a quantum fine line. CONSTITUTION:Injection and traveling of carrier are made one dimension by providing an n-GaAs anode layer 2, an RTB layer 3, an n-GaAs cathode layer 4 which is a carrier injection layer and a WSi depleting electrode 8 which is applied to a side in the n-GaAs cathode layer 4 and generates a Schottky junction together with the n-GaAs cathode layer 4 to enlarge a depletion layer 9 inside the n-GaAs cathode layer 4.
申请公布号 JPH05243557(A) 申请公布日期 1993.09.21
申请号 JP19920042768 申请日期 1992.02.28
申请人 FUJITSU LTD 发明人 IMAMURA KENICHI
分类号 H01L29/68;H01L29/06;H01L29/205;(IPC1-7):H01L29/68 主分类号 H01L29/68
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