发明名称 MULTILAYER CVD DIAMOND FILMS
摘要 GEMAT 7 (60-SD-528) Multilayer CVD diamond films are provided, wherein grain boundaries of the diamond layers are interrupted by renucleating and growing diamond on new nucleation sites comprised of metal. These nucleation sites are positioned on the interface between diamond layers. Methods for producing these multilayer CVD diamond films are also provided wherein the diamond growth on a substrate is interrupted by the deposition of metals which provide new nucleation sites. Diamond growth is then reinitiated.
申请公布号 CA2089288(A1) 申请公布日期 1993.09.21
申请号 CA19932089288 申请日期 1993.02.11
申请人 SLUTZ, DAVID E. 发明人 SLUTZ, DAVID E.
分类号 C23C16/26;C23C16/06;C23C16/27;C23C16/30;C23C28/00;C30B25/02;C30B29/04;(IPC1-7):C23C16/26;C23C16/22 主分类号 C23C16/26
代理机构 代理人
主权项
地址