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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH05243396(A)
申请公布日期
1993.09.21
申请号
JP19920044408
申请日期
1992.03.02
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
ISHIKAWA OSAMU;OTA TOSHIMICHI;MAEDA MASAHIRO;NISHIJIMA MASAAKI
分类号
H01L21/768;H01L29/41;(IPC1-7):H01L21/90;H01L29/44
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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