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经营范围
发明名称
INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH05240926(A)
申请公布日期
1993.09.21
申请号
JP19920078965
申请日期
1992.02.29
申请人
NEC CORP
发明人
SAITO TSUKASA
分类号
G01R31/28;G01R31/3185;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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