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发明名称
PLASMA DEVICE
摘要
申请公布号
JPH05242997(A)
申请公布日期
1993.09.21
申请号
JP19920041566
申请日期
1992.02.27
申请人
NEC CORP
发明人
TOKUSHIMA MASATOSHI
分类号
C23C16/50;C23C16/511;H01L21/302;H01L21/3065;H05H1/46;(IPC1-7):H05H1/46
主分类号
C23C16/50
代理机构
代理人
主权项
地址
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