摘要 |
PURPOSE:To obtain the plane antenna which can use an oxide superconductor as a conductor part. CONSTITUTION:The plane antenna is constituted by forming semiconductor layers 3a, 3b, and conductor parts 4, 4a and consisting of an oxide superconductor on a sapphire substrate 1. The sapphire substrate works as a crystal growth substrate being satisfactory to both of the oxide superconductor and a silicon semiconductor, therefore, the desired purpose can be attained. |