摘要 |
In a method of image restoration of an image picture obtained from a scanning electron microscopy, an image enhancement process and a differential process, such as a Sobel filtering process, are carried out separately at the same time onto image data having undergone ordinary smoothing process. Then, these two image data obtained from said two processes are synthesized together. The finally obtained image data, therefore, contain both characteristics which have been included in said two processes. So, fine changes existing in an original image can be reconstructed clearly in the finally obtained image picture. |