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发明名称
MANUFACTURE OF DIELECTRIC ISOLATION SUBSTRATE
摘要
申请公布号
JPH05243372(A)
申请公布日期
1993.09.21
申请号
JP19920044707
申请日期
1992.03.02
申请人
NEC CORP
发明人
MUKAI KANJI
分类号
H01L21/306;H01L21/76;H01L21/762;(IPC1-7):H01L21/76
主分类号
H01L21/306
代理机构
代理人
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