A test structure pattern and method for processing the electrical data extracted from the pattern which allows for the measurement of a short line with a precision on the order of 10 nanometers.
申请公布号
US5247262(A)
申请公布日期
1993.09.21
申请号
US19920852367
申请日期
1992.03.13
申请人
THE UNITED STATES OF AMERICA AS REPRESENTED BY THE SECRETARY OF COMMERCE
