摘要 |
PURPOSE:To improve the inspection sensitivity by using a vibrator array for an ultrasonic-wave transmitter and receiver, controlling the vibrator array and generating an apparent sound source point, and controlling the spreading mode of an ultrasonic wave according to an object of inspection. CONSTITUTION:The ultrasonic wave transmitter and receiver 2 is composed of an array (not shown in figure) of 2n vibrators and a spot sound source whose spread mode of an ultrasonic wave is controllable is scanned by using the transmitter and receiver 2 to obtain data for synthetic aperture. Namely, the transmitter and receiver 2 is shifted by a scanning mechanism 3 to respective positions A, B, C, and D in order and then the spread mode of the ultrasonic wave at the respective positions A-D is controlled. Consequently, the ultrasonic wave never propagates to, for example, a point P even if the ultrasonic wave is reflected at the point P, so no unnecessary echo is generated and noises in an image within an inspection objective range L are suppressed. |