发明名称 DRY SCREW VACUUM PUMP
摘要 PURPOSE:To stably and surely execute a high speed operation by connecting a rotor shaft to a rotor in the position close to a bearing. CONSTITUTION:When a motor 40 is operated, the power is transmitted to a timing gear 42 through a bull gear 44 and the like, and rotors 18, 18 are synchronized by the timing gear 41 and rotated in mutually non-contact state to suck a gas through an inlet port 15 and discharge the compressed gas through a discharge port 16. At this time, the rotor 18 and a rotor shaft 19 are bolted by a cup ring 20 arranged in the rotor 18. For example, a push screw 23 screwed to the cup ring 20 is rotated to move a piston 24, the oil pressure in the space 25 between a body 21 and a pressing member 22 is enhanced, and the pressing member 22 is pressed and connected to the shaft 19. Thus, the connection is conducted in the part close to the bearing 26 of the shaft, and the operating rotating speed can be increased to minimize the inertial moment in the longitudinal or rotating center axial direction of the rotor 18 and shaft 19 and enhance dangerous speed.
申请公布号 JPH05240183(A) 申请公布日期 1993.09.17
申请号 JP19920045629 申请日期 1992.03.03
申请人 HITACHI LTD 发明人 NAYA KOTARO;SHIIKI KAZUAKI;MIHASHI SHINJI;UCHIDA RIICHI;KAMETANI HIROCHIKA
分类号 F04C18/16;F04C25/02;F04C29/00;H01L21/027;H01L21/30;(IPC1-7):F04C25/02 主分类号 F04C18/16
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