| 摘要 |
PURPOSE:To form a soft magnetic alloy thin film excellent in saturation mag netic flux density and coercive force by using an Fe-Al-Si-Co 'Sendust (R)'alloy as a target material and executing sputtering in an atmosphere of an N2 gas-contg. Ar gas. CONSTITUTION:An Fe-Al-Si-Co 'Sendust (R)' alloy is used as a target material, and reaction sputtering is executed in an atmosphere formed by mixing an N gas having 2.5 to 3.5% partial pressure into an Ar gas to form an Fe-Al-Si- Co-N alloy thin film on a film forming substrate heated to about 200 to 300 deg.C. In this way, the objective soft magnetic alloy thin film constituted of 4.0 to 8.0% Al, 6.0 to 12.0% Si, 2.0 to 4.0% Co and 1.0 to 1.7% N, and the balance substantial Fe and having about >=1200G saturation magnetic flux density and about <=0.20e coercive force can be obtd. |
