| 摘要 |
PURPOSE:To provide a mold which is made of a sintered body of silicon carbide, superior in its surface roughness, has high purity and low reaction on a matter to be molded and its manufacture. CONSTITUTION:This is a mold wherein it is made of a sintered body of silicon carbide having a relative density of at least 99.5%, the inside of the sintered body is free from the residual of aluminum compound particles and surface roughness of a molding surface is not exceeding Ra 2nm. A mixed powder comprised of silicon carbide and aluminum or aluminum compound of 0.35-1.00wt.% in terms of aluminum is hot-press-sintered within an argon gas atmosphere at a temperature of 1800-2100 deg.C and loading pressure of at least 10MPa and then the surface roughness of the molding surface of the obtained sintered body is polished to Ra 2nm or less. This mold made of the sintered body of the silicon carbide has a high heat resistance and a high rigidity and can realize excellent surface roughness also and also has a high purity. |
