| 摘要 |
PURPOSE:To enable the marking operation of another kind without degrading the appearance in edge parts after marking and without an operation for replacing a mask. CONSTITUTION:A laser beam oscillated from a pulse laser oscillator 1 is enlarged by an optical system 2 for beam shaping to such a size at which the laser beam transmission part of the mask 5 is covered by several tens shots. This beam is set in an arbitrary position on the mask 5 by a galvanometer 3 for selecting the mask and a collimator lens 4. The laser beam masked by the mask 5 is set and irradiated to the processing position on a processing surface 9 by a galvanometer 6 for positioning and an objective lens 7. |
