PRODUCTION OF ALUMINUM NITRIDE SUBSTRATE

摘要

PURPOSE:To provide a process for the production of a ceramic circuit board for mounting silicon LSI element, etc., especially aluminum nitride substrate and suitable for the industrial mass-production of aluminum nitride substrate having high thermal conductivity without necessitating troublesome operations. CONSTITUTION:A compound of alkaline earth metal or rare earth metal is used as a sintering assistant. The 1st-stage baking is carried out in a non-carbon atmosphere essentially excluding the contact of the baking object with carbon and the 2nd-stage baking is carried out in a carbon atmosphere to ensure sufficient contact of the baking object with carbon.