MAGNETRON SPUTTERING DEVICE,申请号JP19920078423-传众专利搜索

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发明名称	MAGNETRON SPUTTERING DEVICE
摘要
申请公布号	JPH05239639(A)	申请公布日期	1993.09.17
申请号	JP19920078423	申请日期	1992.02.28
申请人	SUMITOMO METAL MINING CO LTD	发明人	HAMADA SHINICHI;MAKI KOICHIRO
分类号	C23C14/35;(IPC1-7):C23C14/35	主分类号	C23C14/35
代理机构		代理人
主权项
地址

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