发明名称 |
CAP STRUCTURE OF VERTICAL FURNACE WITH COVER |
摘要 |
The shaft furnace for heating wafers in manufacturing semiconductors, has a cover for preventing wafers from contamination of a very small amount of stainless steel element or reaction gas condensed powder. The shaft furnace having SUS cap, comprises a crystal cover (3) for capping upper surface of the cap which can be separated to two parts by a pin.
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申请公布号 |
KR930008852(B1) |
申请公布日期 |
1993.09.16 |
申请号 |
KR19900016250 |
申请日期 |
1990.10.13 |
申请人 |
GOLDSTAR ELECTRON CO., LTD. |
发明人 |
SONG, JONG - BU |
分类号 |
H01L21/22;(IPC1-7):H01L21/22 |
主分类号 |
H01L21/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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