发明名称 HOCHVAKUUM-BESCHICHTUNGSANLAGE
摘要 Track wheels 17, 17a of a drive unit 2, forming a high-vacuum coating apparatus together with a vacuum tank, which acts as a receiver for the drive unit which is movable into and out of sealing engagement with one side of the tank, are carried on rails extending towards the receiver by means of track wheels carried on wheel supports which are attached directly to the side of the carrier plate 4 facing away from the receiver. The carrier plate supports a supply roller 5, a take-up roller 6 and a coating roller 7 on its side facing the receiver. This arrangement avoids the use of the drive unit having a bridge-like frame forming a support which has the track wheels and carrier plate attached to it which is expensive and unwieldly. Cooling and heating devices 21 may be provided on a trailer attachment which is coupled to the carrier plate by a horizontal axle and has supporting track wheels rear its trailing end. <IMAGE>
申请公布号 DE4207527(A1) 申请公布日期 1993.09.16
申请号 DE19924207527 申请日期 1992.03.10
申请人 LEYBOLD AG, 63450 HANAU, DE 发明人 CONTZEN, KLAUS, 6369 NIDDERAU, DE
分类号 B01J3/00;C23C14/56 主分类号 B01J3/00
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